Speaker Information
Yosuke Inase
SHINCRON Co., Ltd., Yokohama, Japan
Abstract
Physical Vapor Deposition (PVD) systems are fundamental to Surface Acoustic Wave (SAW) filter manufacturing, enabling precise thin film deposition critical for high-performance acoustic devices. This presentation provides a comprehensive overview of PVD systems specifically designed for SAW filter production, focusing on equipment specifications, process parameters, and manufacturing considerations. Key aspects include cathodic arc deposition for aluminum and aluminum alloy electrode formation, sputtering techniques for SiO₂ temperature compensation layers, and advanced plasma-assisted deposition processes. The presentation will cover critical parameters such as deposition rates, film uniformity control, stress management, and interface quality optimization. Additionally, we will discuss challenges in scaling up PVD processes for high-volume manufacturing, including wafer handling, thermal management, and contamination control. Recent developments in in-situ monitoring and process control systems for SAW manufacturing will also be presented, highlighting how these technologies improve yield and device performance in next-generation RF filters.
Speaker Biography
Yosuke Inase is a PVD Specialist at SHINCRON Co., Ltd., a leading provider of vacuum deposition equipment and systems. He holds a Bachelor's degree in Mechanical Engineering from Shibaura Institute of Technology and has extensive experience in designing and optimizing PVD systems for various industrial applications. His expertise includes cathodic arc deposition, magnetron sputtering, and plasma-assisted deposition processes specifically tailored for electronic component manufacturing.
Key Achievements:
- Specialized in PVD system design for SAW filter manufacturing
- Expert in cathodic arc deposition for aluminum alloy electrodes
- Developed advanced sputtering processes for SiO₂ temperature compensation layers
- Contributed to scaling up PVD processes for high-volume manufacturing
- Knowledgeable in in-situ monitoring and process control systems